Description

Designed for modular “Block” gas bars and panels, the Setra Model 217 Pressure Transmitter is ideal for pressure measurement applications in harsh environments such as temperature transients caused by cold airflow.

The Model 217 Pressure Transmitter can be fitted with a downwardly mounted pressure port with a Type C or W seal with a small sensor chamber that is easy to purge. All wetted parts are made of VIM/VAR 316L stainless steel and surface passivated to 5 Ra (up to 7 Ra) to ensure a smooth surface and chemical resistance for contamination-free gas delivery. Each sensor was subjected to a helium leak test of 1 x 10-9 ATM.CC/sec level using a mass spectrometer.

All of Setra’s ultra-high-purity products are based on Setra’s proven capacitive sensing technology, which provides a highly accurate, stable voltage or current output signal that is virtually immune to EMI/RFI interference.

  • Low leakage rate
  • VCR connector
  • A small chamber that is easy to purge
  • 200PSI/250PSI/3000PSI

Characteristic

  • 316 L VIM/VAR stainless steel
  • Surface finish 7 Ra
  • VCR connector
  • 1×10-9 ATM.CC/sec level ammonia leakage test
  • Excellent stability and avoid downtime
  • Optional pressure port with C or W seal
  • Anti-electromagnetic interference / RF interference to prevent accidental downtime
  • Easy to purge
  • Meets CE and RoHS standards

Applications

  • Modular “Block” gas bars and panels
  • High purity gas delivery system
  • Semiconductor process tools