Designed for high-density modular “Block” gas bars and panels, the Setra Model 227 Pressure Transmitter meets the requirements of today’s 300 mm tools. This model occupies only 11/8′′ of space, saving valuable space; its rugged construction is ideal for long-term stability, high precision and pressure measurement for harsh environments. Others use large-capacity head chambers. Depending on the product, the Setra Model 227 pressure transmitter features a small sensor chamber design that is easy to purge. All wetted parts are made of VIM/VAR 316L stainless steel and surface passivated to 5 Ra (max. 7 Ra), ensuring The surface is flat and chemically resistant for non-polluting gas delivery.
■ Low leakage rate
■ VCR connector
■ Small chamber that is easy to purge
- 11/8′′ “Block” gas bar and panel
- High purity gas delivery system
- Semiconductor process tools